Materials characterization; Spectroscopy methods and lasers

Manufacturer and Model

ThermoFisher - ESCALAB Xi



Applications and capabilities

Large Area Spectroscopy

The combination of high efficiency lenses and detectors ensures the highest sensitivity for large area spectroscopy applications; high-resolution spectra acquired in seconds!

  • Maximum chemical detectability
  • Six channel electron multipliers for maximum dynamic range
  • Twin crystal monochromator for maximum X-ray flux

Small Area Spectroscopy

ESCALAB Xi provides fast and precise small area analysis.

  • Small feature analysis from greater than 900 µm to 20 µm
  • Source-defined analysis from greater than 900 µm to less than 200 µm
  • Lens-defined small area down to less than 20 µm
  • Software enabled feature selection via real time iris and image control


Fast Parallel Imaging

Parallel imaging produces rapid, high-resolution XPS chemical images.

  • Less than 3 µm chemical imaging resolution
  • Small area retrospective spectroscopy less than 6 µm
  • Signature free detection system
  • Imaging of both large and small features
  • Single input lens and analyser for imaging and spectroscopy
  • Collection of image stacks for quantitative chemical state imaging
  • PCA for composition image analysis


Energy Resolution

Excellent energy resolution is achieved with the combination of advanced analyzer design and a twin-crystal microfocusing X-ray monochromator.

  • Identification and quantification of individual chemical states
  • Resolve overlapping peaks and subtle differences in surface chemistry


Insulator Analysis

Insulating samples are easily analyzed using state-of-the-art charge compensation.

  • Automated analysis of insulators
  • Excellent performance under all analysis conditions


Depth Profiling

The advanced new ion gun provides high current density even at low beam energy. Auto-tuning of the ion gun ensures optimum crater quality and profiling speed.

  • Azimuthal and off-axis sample rotation during profiling
  • Full computer control of the ion gun operation modes
  • Automated gas handling for etch rate repeatability Angle Resolved XPS
  • Software controlled angular resolution ensures optimum repeatability
  • Eucentric tilt for constant analysis position regardless of sample thickness
  • Direct mechanical drive ensures accuracy and precision of tilt position
  • Integrated suite of ARXPS processing tools, including Max-Ent (profile reconstruction) and multilayer thickness calculator


Reflection Electron Energy Loss Spectroscopy

Complementary electronic, structural and phase information can be provided using the ESCALAB Xi+ in-lens electron source.

  • Hydrogen identification and quantification for polymers and other materials
  • Narrow energy spread and an energy range of 0 to 1000 eV Ion


Scattering Spectroscopy

Reversible polarity lens and analyzer power supplies make ISS a standard feature.

  • Channel electron multipliers provide maximum dynamic range while avoiding image detector damage


Ultra-violet Photoelectron Spectroscopy

Rapid, high-resolution UPS measurements are possible with the high-flux UV lamp option.

  • Excellent electronics stability and low-energy performance required for work-function measurements
  • Mu-metal analysis chamber provides optimum magnetic shielding