The core of Nanotechnology centre is 650 m2 large cleanroom with cleanliness ranging from ISO 4 to ISO 8 with state-of-the-art equipment and expertise for cutting edge nano and micro fabrication both in fundamental research and device development.

 

Cleanroom ensures continuous improvements and quality control based on ISO 9001

Nanotechnology centre is a part of EUROnanoLAB


EXPERTISE

Thin films

Microfluidics

OLEDs

Polymer photonics

1D and 2D material nanodevices

Wide range of thin film deposition techniques and development of new materials Using PDMS and alternative non-absorbing materials we are focusing on applications in biology: organs on chips and extracellular vesicles Full fabrication and characterization cycle Interferometers, modulators, ring resonators and other devices utilizing non-linear properties of organic materials Graphene and nanowires based sensors and other devices

Technologies

  • THIN FILM DEPOSITIONS
    Thermal evaporation, magnetron sputtering (DC,RF, reactive, HIPIMS), pulsed laser deposition, atomic layer deposition, plasma enhanced chemical vapor deposition, ink-jet printing, spin-coating

  • LITHOGRAPHY
    Electron beam lithography, UV lithography, direct laser writer

  • ETCHING
    Reactive ion etching, wet etching

  • CHARACTERIZATION
    SEM-FIB, EDS, EBDS, STEM, TEM, profilers, probe station, optical microscopes, drop shape analyzer, XPS, EPR and other spectroscopical characterization available

  • OTHER
    Glove boxes, wire bonders, HMDS oven, plasma asher, 3D printing, fume hoods etc. Electrochemical investigation and gas analysis


Opportunities

With its extensive facilities, the Nanotechnology centre offers a wide spectrum of opportunities for R & D activities.

It is an open-access research laboratory and hosts both elite academic research and a multitude of industrial collaborations.