The core of Nanotechnology centre is 650 m2 large cleanroom with cleanliness ranging from ISO 4 to ISO 8 with state-of-the-art equipment and expertise for cutting edge nano and micro fabrication both in fundamental research and device development.
Cleanroom ensures continuous improvements and quality control based on ISO 9001 |
Nanotechnology centre is a part of EUROnanoLAB |
EXPERTISE
Thin films | Microfluidics | OLEDs | Polymer photonics | 1D and 2D material nanodevices |
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| Wide range of thin film deposition techniques and development of new materials | Using PDMS and alternative non-absorbing materials we are focusing on applications in biology: organs on chips and extracellular vesicles | Full fabrication and characterization cycle | Interferometers, modulators, ring resonators and other devices utilizing non-linear properties of organic materials | Graphene and nanowires based sensors and other devices |
Technologies
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THIN FILM DEPOSITIONS
Thermal evaporation, magnetron sputtering (DC,RF, reactive, HIPIMS), pulsed laser deposition, atomic layer deposition, plasma enhanced chemical vapor deposition, ink-jet printing, spin-coating -
LITHOGRAPHY
Electron beam lithography, UV lithography, direct laser writer -
ETCHING
Reactive ion etching, wet etching -
CHARACTERIZATION
SEM-FIB, EDS, EBDS, STEM, TEM, profilers, probe station, optical microscopes, drop shape analyzer, XPS, EPR and other spectroscopical characterization available -
OTHER
Glove boxes, wire bonders, HMDS oven, plasma asher, 3D printing, fume hoods etc. Electrochemical investigation and gas analysis
