Category
Materials synthesis and treatment; Cleanrooms
Manufacturer and Model
Laurell - WS-650Mz-23NPPB/UD3
Specifications
Spin coater features:
- Up to 150 mm substrates (with alignment tool for wafers)
- Up to 12 kRPM speeds (up to 13 kRPM acceleration) - actual acceleration/max speeds are sample size dependent
- Chucks for:
- samples up to 15mm
- 5 - 25 mm
- 25 x 75 mm slide adapter
- 50 - 150 mm chuck
- Dynamic dispensing system: available for AZ1518, AZ1505 and LOR resists
- Manual edge bead removal system
- Multi-step program building using Bluetooth connection and dedicated software (coming soon)
