Profiler

Category

Materials characterization; Cleanrooms; Microscopy

Manufacturer and Model

Various

Specifications

Dektak 150:

• Measurement technique: Stylus profilometry
• Measurement capability: Two-dimensional surface profile measurements
• Sample viewing: 640 x 480-pixel (1/3in.-format) camera, USB
  • fixed magnification: 2.6mm FOV (166X with 17in. monitor)
  • manual zoom: variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)
• Stylus sensor: Low-Inertia Sensor (LIS 3)
• Stylus force: 0.03 to 15mg (N-Lite sensor)
• Stylus radius: 12.5μm and 2.5μm
• Sample stage: Manual X/Y/Θ, 100 x 100mm X-Y translation, 360° rotation, 150mm (6in.) travel,1μm repeatability, 0.5μm resolution
• Software: Dektak software running under Windows XP, Step Detection software (std.), Stress Measurement software, 3D Vision analysis software
• Performance:
  • Scan length range: 55mm (2.16in.)
  • Data points per scan: 60,000 maximum
  • Max. sample thickness: Up to 100mm (4in.)
  • Max. wafer size: 150mm (6in.)
  • Step height repeatability: 6Å, 1 sigma on 0.1μm step
  • Vertical range: 1mm (0.039in.)
  • Vertical resolution: 1Å max. (at 6.55μm range)

Zygo 7100:

• Measurement technique: 3D optical interferometer
• Field of view: from 0.5 to 2 mm
• Objectives: 5x, 10x and 50x
• Optical resolution: ≤ 4µm
• x/y scan rate: ≤ 26µm/sek
• Sample stage: Motorized 150 mm x/y travel; Manual ±6° tip/tilt
• Sample maximum size: 89 x 203 x 203 mm
• Vertical resolution: 0.1nm
• Vertical scan range: 150µm
• Focus: Motorized manual and auto focus
• On-screen live display: 23" TFT monitor with live display
• Scanning and processing software: ZYGO MetroPro