Materials characterization; Cleanrooms; Microscopy

Manufacturer and Model



Dektak 150:

  • Measurement technique: Stylus profilometry
  • Measurement capability: Two-dimensional surface profile measurements
  • Sample viewing: 640 x 480-pixel (1/3in.-format) camera, USB
    • fixed magnification: 2.6mm FOV (166X with 17in. monitor)
    • manual zoom: variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)
  • Stylus sensor: Low-Inertia Sensor (LIS 3)
  • Stylus force: 0.03 to 15mg (N-Lite sensor)
  • Stylus radius: 12.5μm and 2.5μm
  • Sample stage: Manual X/Y/Θ, 100 x 100mm X-Y translation, 360° rotation, 150mm (6in.) travel,1μm repeatability, 0.5μm resolution
  • Software: Dektak software running under Windows XP, Step Detection software (std.), Stress Measurement software, 3D Vision analysis software
  • Performance:
    • Scan length range: 55mm (2.16in.)
    • Data points per scan: 60,000 maximum
    • Max. sample thickness: Up to 100mm (4in.)
    • Max. wafer size: 150mm (6in.)
    • Step height repeatability: 6Å, 1 sigma on 0.1μm step
    • Vertical range: 1mm (0.039in.)
    • Vertical resolution: 1Å max. (at 6.55μm range)

Zygo 7100:

  • Measurement technique: 3D optical interferometer
  • Field of view: from 0.5 to 2 mm
  • Objectives: 5x, 10x and 50x
  • Optical resolution: ≤ 4µm
  • x/y scan rate: ≤ 26µm/sek
  • Sample stage: Motorized 150 mm x/y travel; Manual ±6° tip/tilt
  • Sample maximum size: 89 x 203 x 203 mm
  • Vertical resolution: 0.1nm
  • Vertical scan range: 150µm
  • Focus: Motorized manual and auto focus
  • On-screen live display: 23" TFT monitor with live display
  • Scanning and processing software: ZYGO MetroPro

Applications and capabilities

  • Transparent films/photoresist and other films thickness
  • Thin- and thick-film measurements
  • Roughness studies
  • Surface quality and defect review