The advantages of SIMS and APT technologies applications in materials sciences

Emmanuel Camescasse (CAMECA) speaks at the scientific seminar of the Institute of Solid State Physics UL Doctoral School “Functional Materials and Nanotechnologies” On May 31 at 15:30, Ķengaraga street 8, 2nd floor hall.

Magnetic Sector SIMS (Secondary Ion Mass Spectrometry) is applied to a variety of applications in Materials Sciences, IC and Semiconductors development and process control, Solar Photovoltaic (PV) cell technology.

The benefit of Magnetic Sector SIMS for Research and development in material sciences will be reviewed through selected applications in this field. The fundamentals of the technology (theory and instrumentation) will also be reviewed.

3D Atom Probe is also applied to a large variety of application in the same field. This advanced analytical technique is adopted by major Semi-conductor and material research laboratories.

After reviewing the fundamentals of this characterization technique and sample preparation, we discuss selected applications for advanced research in 65, 28 and 14 nm nodes, with examples of planar and Fin-FET CMOS structures.