LASER APPLICATIONS IN ATOM RESEARCH AND OPTICAL LITOGRAPHY

Dr.habil.phys. Uldis Bērziņš (ISSP UL) speaks at ISSP UL Doctoral School “Functional Materials and Nanotechnologies”, Ķengaraga street 8, January 4, at 13:00.

The workshop will present some of the results from the "Atom and Negative Ion Radiation Process Studies with Laser Spectroscopy methods": transition probability and lifetime of subgroups V and VI, and refractive element superstructure constant measurements, and will detail the method of measuring isotope shifts for negative ion electron photo detraction threshold energy between chlorine isotopes.

Dr.habil.phys. Uldis Bērziņš will share his experience working on the design of mask writing machines and their production for optical lithography. He will tell in detail about the use of micromirror matrix for image projection on photo plate and use of an interferometer to test photoresists for 193 nm laser mask writers.

Afterwards, there will be presentation of ISSP UL project submitted to Investment and Development Agency of Latvia “Micromanipulator clusters”, and finally, some laser ablation application ideas that Uldis Bērziņš would like to see implemented at ISSP.