Grāda pretendentes Katrīnas Laganovskas promocijas darba “Defects and optical properties of undoped and rare-earth doped HfO2/ZrO2” priekšaizstāvēšana notiks 8. novembrī plkst. 13.00 LU CFI Konferenču zālē.

 

Because of its desirable features such as a broad band gap and a high-k value, hafnia has become a popular choice among high dielectric gate materials for CMOS applications. Hafnia has a high heat of formation as well as excellent chemical compatibility with silicon, in addition being chemically and thermally stable.

However, compared to SiO2, HfO2 has a higher defect concentration, resulting in a higher density of charge traps, transient instability of the gate threshold voltage, coulomb scattering of carriers in the substrate channel, and source-level voltage instability. Although HfO2 has already been successfully used in large scale manufacturing as a high-k metal gate material, the intrinsic defects still present a significant challenge.

Therefore the aim of this work is to study defects in HfO2 and ZrO2 using intrinsic defect luminescence, thermostimulated luminescence and rare-earth ion luminescent probes.

This work presents a study on the impact of the phase of the material on the luminescent properties as well as rare-earth ion incorporation mechanisms in HfO2 and ZrO2. Furthermore, using thermostimulated luminescence, VO3+1, VO3+2 and VO4+1+VO4+2 defects are identified in undoped HfO2.

Theses:

  1. The distribution and concentration of oxygen vacancies determine the resulting rare-earth ion luminescence rather than the surrounding crystal symmetry
  2. Rare-earth ion luminescence can be used to control the sintering processes in ceramics
  3. VO3+1, VO3+2 and VO4+1+VO4+2 defects were identified in monoclinic HfO2 using thermostimulated luminescence
  4. In monoclinic HfO2, Eu3+ ions  incorporate in pairs as well as single ions, creating VO3+2 and VO3+1 oxygen vacancies.