Materials synthesis and treatment; Spectroscopy methods and lasers 

Manufacturer and Model

Heidelberg Instruments - µPG 101


Light source: 375 nm, laser

Maximum intensity: 70 mW

Write speed: 5 mm2/min

Alignment tolerance: 200 nm (3σ value) with 120 nm edge roughness

Maximum writeable area: 90 x 90 mm 

Applications and capabilities

Laser writer Heidelberg µPG is a direct write mask-less lithography system that utilises UV laser beam to selectively expose samples in regions of interest.

The write head also defines the feature size, which is defined as sub-1µm in the current set up.