Category
Materials synthesis and treatment; Spectroscopy methods and lasers
Manufacturer and Model
Heidelberg Instruments - µPG 101
Specifications
Light source: 375 nm, laser
Maximum intensity: 70 mW
Write speed: 5 mm2/min
Alignment tolerance: 200 nm (3σ value) with 120 nm edge roughness
Maximum writeable area: 90 x 90 mm
Applications and capabilities
Laser writer Heidelberg µPG is a direct write mask-less lithography system that utilises UV laser beam to selectively expose samples in regions of interest.
The write head also defines the feature size, which is defined as sub-1µm in the current set up.