Cleanroom

Cleanroom based Prototyping Laboratory is a facility with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technologies.

Prototyping laboratory services include:

  • Cleaning and surface preparation
  • Electron beam and photolithography
  • Thin film deposition
  • Wet and dry etching
  • Characterization (microscopy, thickness measurements)

Cleanroom provides 650 m² ISO class 7-8 controlled environment with temperature 20 ± 2 °C, overpressure up to 45 Pa as well as deionized water, water cooling systems, house gases (Ar, O2, N2, Ar+H2, Liquid N2), process gases, safety systems and cleanroom safety training.

User access, booking and access is managed by LIMS (laboratory information management system).

Contacts:

Head of ISSP UL Cleanroom: Valdis Korsaks
M: +371 6437272
E: Valdis.Korsaks@cfi.lu.lv

Cleanroom Operational group:

Cleanroom operational group is responsible for the safety and infrastructure of the ISSP UL cleanroom, such as ventilation and exhaust systems, electricity, clean dry air, house gases etc.

ON-CALL DUTY (24/7)

M: +371 20221109

Cleanroom Operational group members:

Head of ISSP UL Cleanroom: Valdis Korsaks
M: +371 6437272
E: Valdis.Korsaks@cfi.lu.lv

Chief engineer: Jānis Kļaviņš
M: +371 29404742
E: Janis.Klavins@cfi.lu.lv

Engineer: Kristaps Grābens
M: +371 26645383
E: Kristaps.Grabens@cfi.lu.lv

IT Service: Jānis Busenbergs
M: +371 26374996
E: Janis.Busenbergs@cfi.lu.lv

ISSP UL Director: Mārtiņš Rutkis
M: +371 67854986
E: Martins.Rutkis@cfi.lu.lv

1. ISSP UL employee

  • Contact to Head of ISSP UL Cleanroom
  • General Safety Training
  • Specific Safety Training in:

1) Guidance for safe work with artificial optical radiation

2) Use of Special gases

3) Use of Chemicals

4) Radiation safety

  • Cleanroom safety and correct behaviour training + LIMS training (if needed)
  • Get access to the cleanroom

2. External academic, external industrials, and other users

  • Contact to MATERIZE Projects Unit.
  • Deputy director in Innovation confirm external user’s industrial relations with ISSP UL
  • General Safety Training
  • Specific Safety Training in:

1) Guidance for safe work with artificial optical radiation

2) Use of Special gases

3) Use of Chemicals

4) Radiation safety

  • Cleanroom safety and correct behaviour training + LIMS training (if needed)
  • Get access to the cleanroom

MATERIZE Projects Unit contacts:

T: +371 6633 4488
F: +371 6713 2778
E: info@materize.com

Responsible for General safety training:

Raitis Siatkovskis
M: +371 29459864
E: Raitis.Siatkovskis@cfi.lu.lv

Responsible for Specific safety training (users shall contacting to responsible for training schedule):

1. Guidance for safe work with artificial optical radiation

Dr. Phys.  Jurģis Grūbe
E: Jurgis.Grube@cfi.lu.lv

2. Use of special gases

Dr. Phys.  Valdis Korsaks
M: +371 26437272
E: Valdis.Korsaks@cfi.lu.lv

3. Use of chemicals

Dr. Phys.  Guntars Vaivars
M: +371 20242643
E: Guntars.Vaivars@cfi.lu.lv

4. Radiation safety

Dr. Phys.  Jānis Jansons
M: +371 26475311
E: Janis.Jansons@cfi.lu.lv

Responsible for Cleanroom safety and correct behaviour training:

Dr. Phys.  Valdis Korsaks
M: +371 26437272
E: Valdis.Korsaks@cfi.lu.lv

The user must apply before course. Write an email to responsible for cleanroom safety and correct behaviour training (write date when you plan attend the course).

Cleanroom safety and correct behaviour training is organized according to schedule below (Date and time are preliminary and subject to change depending on need):

Date, Time

Place, Instructor

26.03.2019; 14:00-17:00

Room 111,  first floor, Valdis Korsaks

09.04.2019; 14:00-17:00

Room 111,  first floor, Valdis Korsaks

23.04.2019; 14:00-17:00

Room 111,  first floor, Valdis Korsaks

07.05.2019; 14:00-17:00

Room 111,  first floor, Valdis Korsaks

21.05.2019; 14:00-17:00

Room 111,  first floor, Valdis Korsaks

04.06.2019; 14:00-17:00

Room 111,  first floor, Valdis Korsaks