Cleanroom provides 650 m² ISO class 4-8 controlled environment with temperature 20 ± 2 °C, overpressure up to 60 Pa as well as deionized water, water cooling systems, house gases (Ar, O2, N2, Ar+H2, Liquid N2), process gases, safety systems and cleanroom safety training.

ISSP UL Cleanroom Services in 650 m2.

User access, booking and access is managed by LIMS (laboratory information management system).

Services provided by laboratories based in cleanrooms are also accessible in cleanrooms. Cleanroom based Prototyping Laboratory is a facility with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technologies. Prototyping laboratory services include:

  • Cleaning and surface preparation
  • Electron beam and photolithography
  • Thin film deposition
  • Wet and dry etching
  • Characterization (microscopy, thickness measurements)

Contacts:

Head of ISSP UL Cleanroom: Valdis Korsaks
E: Valdis.Korsaks@cfi.lu.lv

Cleanroom Operational group:

Cleanroom operational group is responsible for the safety and infrastructure of the ISSP UL cleanroom, such as ventilation and exhaust systems, electricity, compressed dry air, house gases etc.

ON-CALL DUTY (24/7)

M: +371 20221109

Cleanroom Operational group members:

Head of ISSP UL Cleanroom: Valdis Korsaks
E: Valdis.Korsaks@cfi.lu.lv

Chief engineer: Jānis Kļaviņš
E: Janis.Klavins@cfi.lu.lv

Service Engineer: Janis Lipenits
E: Lipenits.Janis@cfi.lu.lv

IT Service: Jānis Busenbergs
E: Janis.Busenbergs@cfi.lu.lv

ISSP UL Director: Mārtiņš Rutkis
E: Martins.Rutkis@cfi.lu.lv

 

1. ISSP UL employee

  • Contact to Head of ISSP UL Cleanroom
  • General Safety Training
  • LIMS training
  • Cleanroom safety and correct behaviour training
  • Get access to the cleanroom

2. External academic, external industrials, and other users

  • Contact to MATERIZE Projects Unit.
  • Deputy director in Innovation confirm external user’s industrial relations with ISSP UL
  • General Safety Training
  • LIMS training
  • Cleanroom safety and correct behaviour training
  • Get access to the cleanroom

MATERIZE Projects Unit contacts:

T: +371 6633 4488
F: +371 6713 2778
E: info@materize.com

Responsible for General safety training:

Raitis Siatkovskis
E: Raitis.Siatkovskis@cfi.lu.lv

Responsible for Cleanroom safety and correct behaviour training:

Dr. Phys.  Valdis Korsaks
E: Valdis.Korsaks@cfi.lu.lv

The user must apply before course. Write an email to responsible for cleanroom safety and correct behaviour training (write date when you plan attend the course).

Cleanroom safety and correct behaviour training is organized according to schedule below (Date and time are preliminary and subject to change depending on need):

Date, Time

Place, Instructor

17.08.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks
07.09.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks
21.09.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks
05.10.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks
19.10.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks
02.11.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks
16.11.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks
30.11.2021; 10:00-15:00 2nd floor autorium, Valdis Korsaks

Equipment in cleanrooms

Category: Chemical laboratories and their equipment; Cleanrooms

Manufacturer; Model: Mbraun; Unilab Pro Eco 3 gloves

Short description: Glovebox is made for work in an inert atmosphere (Ar) while keeping humidy and oxygen to minimum (<1 ppm).

Full description

Category: Microscopy; Materials characterization; Cleanrooms

Manufacturer; Model: Tescan Lyra

Short description: 

Full description

Category: Microscopy; Materials characterization; Cleanrooms

Manufacturer; Model: Fei;Tecnai GF20

Short description: TEM Fei Tecnai G2 F20 is an electron microscope with the highest resolution in Latvia. Measurements with TEM provides high resolution information about the composition, structure and morphology of the sample.

Full description

Category: Materials synthesis and treatment; Cleanrooms

Manufacturer; Model: Raith; eLINE Plus

Short description: Ultra high resolution electron beam lithography system for nanofabrication on substrates up to 100 mm. Laser interferometer stage with resolution 1 nm. Secondary electron detectors for high resolution imaging. System equipped with load lock and Traxx and Periodixx features.

Full description

Category: Materials synthesis and treatment; Cleanrooms

Manufacturer; Model: Sidrabe; SAF25/50

Short description: The SAF25/50 multifunctional R&D cluster tool is intended for research and development works as well as for feasibility studies and more general academic work in the field of thin film technologies.

Full description

Category: Microscopy; Cleanrooms

Manufacturer; Model: Nikon; Various

Short description: 

Full description

Category: Materials characterization; Cleanrooms; Microscopy

Manufacturer; Model: Various

Short description: Profiler is applicable to determination of transparent films/photoresist and other films thickness, thin- and thick-film measurements, toughness studies, surface quality and defect review.

Full description

Category: Materials synthesis and treatment; Cleanrooms

Manufacturer; Model: Ražotājs; modelis

Short description: Spin coater is tool for application of a thin film (a few nm to a few um) evenly across the surface of a substrate by coating (casting) a solution of the desired material in a solvent (an "ink") while it is rotating.

Full description

Category: Materials synthesis and treatment; Cleanrooms

Manufacturer; Model: Laurell; WS-650Mz-23NPPB/UD3 

Short description: Spin coater is tool for application of a thin film (a few nm to a few um) evenly across the surface of a substrate by coating (casting) a solution of the desired material in a solvent (an "ink") while it is rotating.

Full description

Category: Materials synthesis and treatment; Cleanrooms

Manufacturer; Model: Edwards; Auto 306

Short description: The AUTO 306 is a compact, versatile vacuum coater. Tool is designed for physical vapour deposition processes under high vacuum. It is not suitable for use on processes which use chemical vapour deposition. 

Full description

Category: Materials synthesis and treatment; Cleanrooms

Manufacturer; Model: F&S Bondtec; 53xx BDA

Short description: 

Full description

Category: Materials synthesis and treatment; Cleanrooms

Manufacturer; Model: Novascan Technologies - PSDP-UV8T

Short description: UV Ozone Cleaner is capable of removing contamination on the surface of samples. By using a high-power UV light source, ozone is generated - which then breaks down surface contaminants into volatile compounds.

Full description

Category: Chemical laboratories and their equipment; Cleanrooms

Manufacturer; Model: Terra Universal; Ductless Exhaust Purification Hood

Short description: Chemical Fume hood for Solvent exhaust. Containing vapors, dusts, gases, and fumes generated within the hood, and removing them as air flows into the hood and then out via the exhaust system.

Full description