Cleanroom provides 650 m² ISO class 4-8 controlled environment with temperature 20 ± 2 °C, overpressure up to 60 Pa as well as deionized water, water cooling systems, house gases (Ar, O2, N2, Ar+H2, Liquid N2), process gases, safety systems and cleanroom safety training.
ISSP UL Cleanroom Services in 650 m2.
User access, booking and access is managed by LIMS (laboratory information management system).
Services provided by laboratories based in cleanrooms are also accessible in cleanrooms. Cleanroom based Prototyping Laboratory is a facility with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technologies. Prototyping laboratory services include:
- Cleaning and surface preparation
- Electron beam and photolithography
- Thin film deposition
- Wet and dry etching
- Characterization (microscopy, thickness measurements)
Contacts:
Head of ISSP UL Cleanroom: Valdis Korsaks
E: Valdis.Korsaks@cfi.lu.lv
Cleanroom Operational group:
Cleanroom operational group is responsible for the safety and infrastructure of the ISSP UL cleanroom, such as ventilation and exhaust systems, electricity, compressed dry air, house gases etc.
ON-CALL DUTY (24/7)
M: +371 20221109
Cleanroom Operational group members:
Head of ISSP UL Cleanroom: Valdis Korsaks
E: Valdis.Korsaks@cfi.lu.lv
Chief engineer: Jānis Kļaviņš
E: Janis.Klavins@cfi.lu.lv
Service Engineer: Janis Lipenits
E: Lipenits.Janis@cfi.lu.lv
IT Service: Jānis Busenbergs
E: Janis.Busenbergs@cfi.lu.lv
ISSP UL Director: Andris Anspoks
E: Andris.Anspoks@cfi.lu.lv
1. ISSP UL employee
- Contact to Head of ISSP UL Cleanroom
- General Safety Training
- LIMS training
- Cleanroom safety and correct behaviour training
- Get access to the cleanroom
2. External academic, external industrials, and other users
- Contact to MATERIZE Projects Unit.
- Materize project Unit confirms external user’s industrial relations with ISSP UL
- General Safety Training
- LIMS training
- Cleanroom safety and correct behaviour training
- Get access to the cleanroom
MATERIZE Projects Unit contacts:
T: +371 6633 4488
F: +371 6713 2778
E: info@materize.com
Responsible for General safety training:
Raitis Siatkovskis
E: Raitis.Siatkovskis@cfi.lu.lv
Responsible for Cleanroom safety and correct behaviour training:
Dr. Phys. Valdis Korsaks
E: Valdis.Korsaks@cfi.lu.lv
The user must apply before course. Write an email to responsible for cleanroom safety and correct behaviour training (write date when you plan attend the course).
Cleanroom safety and correct behaviour training is organized according to schedule below (Date and time are preliminary and subject to change depending on need):
| Date, Time | Place, Instructor |
| 30.11.2021; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
| 14.12.2021; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
| 11.01.2022; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
| 25.01.2022; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
| 08.02.2022; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
| 22.02.2022; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
| 08.03.2022; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
| 22.03.2022; 10:00-15:30 | 2nd floor autorium, Valdis Korsaks |
Equipment in cleanrooms
Category: Chemical laboratories and their equipment; Cleanrooms
Manufacturer; Model: Mbraun; Unilab Pro Eco 3 gloves
Short description: Glovebox is made for work in an inert atmosphere (Ar) while keeping humidy and oxygen to minimum (<1 ppm).
Category: Microscopy; Materials characterization; Cleanrooms
Manufacturer; Model: Tescan Lyra
Short description:
Category: Microscopy; Materials characterization; Cleanrooms
Manufacturer; Model: Fei;Tecnai GF20
Short description: TEM Fei Tecnai G2 F20 is an electron microscope with the highest resolution in Latvia. Measurements with TEM provides high resolution information about the composition, structure and morphology of the sample.
Category: Materials synthesis and treatment; Cleanrooms
Manufacturer; Model: Raith; eLINE Plus
Short description: Ultra high resolution electron beam lithography system for nanofabrication on substrates up to 100 mm. Laser interferometer stage with resolution 1 nm. Secondary electron detectors for high resolution imaging. System equipped with load lock and Traxx and Periodixx features.
Category: Materials synthesis and treatment; Cleanrooms
Manufacturer; Model: Sidrabe; SAF25/50
Short description: The SAF25/50 multifunctional R&D cluster tool is intended for research and development works as well as for feasibility studies and more general academic work in the field of thin film technologies.
Category: Microscopy; Cleanrooms
Manufacturer; Model: Nikon; Various
Short description:
Category: Materials characterization; Cleanrooms; Microscopy
Manufacturer; Model: Various
Short description: Profiler is applicable to determination of transparent films/photoresist and other films thickness, thin- and thick-film measurements, toughness studies, surface quality and defect review.
Category: Materials synthesis and treatment; Cleanrooms
Manufacturer; Model: Ražotājs; modelis
Short description: Spin coater is tool for application of a thin film (a few nm to a few um) evenly across the surface of a substrate by coating (casting) a solution of the desired material in a solvent (an "ink") while it is rotating.
Category: Materials synthesis and treatment; Cleanrooms
Manufacturer; Model: Laurell; WS-650Mz-23NPPB/UD3
Short description: Spin coater is tool for application of a thin film (a few nm to a few um) evenly across the surface of a substrate by coating (casting) a solution of the desired material in a solvent (an "ink") while it is rotating.
Category: Materials synthesis and treatment; Cleanrooms
Manufacturer; Model: Edwards; Auto 306
Short description: The AUTO 306 is a compact, versatile vacuum coater. Tool is designed for physical vapour deposition processes under high vacuum. It is not suitable for use on processes which use chemical vapour deposition.
Category: Materials synthesis and treatment; Cleanrooms
Manufacturer; Model: F&S Bondtec; 53xx BDA
Short description:
Category: Materials synthesis and treatment; Cleanrooms
Manufacturer; Model: Novascan Technologies - PSDP-UV8T
Short description: UV Ozone Cleaner is capable of removing contamination on the surface of samples. By using a high-power UV light source, ozone is generated - which then breaks down surface contaminants into volatile compounds.
Category: Chemical laboratories and their equipment; Cleanrooms
Manufacturer; Model: Terra Universal; Ductless Exhaust Purification Hood
Short description: Chemical Fume hood for Solvent exhaust. Containing vapors, dusts, gases, and fumes generated within the hood, and removing them as air flows into the hood and then out via the exhaust system.